| http://www.w3.org/ns/prov#value | - First, to form a lower electrode made of Ta, a Ta thin film 112 is deposited to a film thickness of about 5,000 angstroms in such a manner as to cover the entire surface of an insulating substrate 111 as shown in FIG. 1A. The insulating substrate 111 may have a protective film on its surface.
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