About: http://webisa.webdatacommons.org/79128304

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, when using such an insulating layer as a mask layer, it can be used in patterning as a microscopic mask.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com