About: http://webisa.webdatacommons.org/7986166

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present invention is an extension of the selective tungsten CVD process described in the aforesaid U.S. Pat. No. 4,746,621 to produce stress-free cantilever beams that can be deflected using applied electric fields.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com