| http://www.w3.org/ns/prov#value | - If the transfer port is provided with opening and closing means such as shutters, the first air injecting section may be provided in the opening and closing means. [0035] In a manufacturing apparatus according to the present invention set forth in claim 12, the first air section is arranged around a periphery of the transfer port and composed of a plurality of air nozzles that form an air curtain.
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