About: http://webisa.webdatacommons.org/88316663

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 2A is a schematic block diagram of a photolithography tool in combination with a reticle handling system according to the present invention that includes a reticle library, a first reticle handler, and a second reticle handler;
http://www.w3.org/ns/prov#wasQuotedFrom	google.com