About: http://webisa.webdatacommons.org/89940163

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, the device is an accelerometer and the substrate comprises a cantilever beam with the gage pairs on opposite surfaces to be strained respectively in tension and compression.
http://www.w3.org/ns/prov#wasQuotedFrom	google.ca