About: http://webisa.webdatacommons.org/97921376

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, in optimization of evaluation original data including only the assist pattern, light beams from the assist pattern and the main pattern sometimes reinforce each other and sometimes weaken each other on the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com