About: http://webisa.webdatacommons.org/101047873

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The tunnel oxide layer 52 may be formed of one of metal oxide, silicon oxynitride, silicon oxide and a stacked multi-layer structure including metal oxide, silicon oxynitride and silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com