PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • Alternatively, wafers can be manufactured with a material such as silicon and the like in a step 203 (wafer manufacture step). [0196] Next, in the step 204 (wafer processing step), actual circuits and the like are formed on the wafers by using wafers prepared in step 201 and step 203 according to a lithographic technique and the like as described later.
http://www.w3.org/ns/prov#wasQuotedFrom
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