About: http://webisa.webdatacommons.org/103748661

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An article according to any paragraph above wherein said substrate is a semiconductor wafer and said pad comprises a chemical mechanical planarization pad.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es