About: http://webisa.webdatacommons.org/107972808

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, in the present invention, it is also possible to put structures formed of materials other than polysilicon and silicon nitride, such as silicon oxide (SiO2), silicon oxide nitride (SiON), and silicon oxide carbide (SiOC).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com