About: http://webisa.webdatacommons.org/109497585

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In one embodiment, a source of a carrier gas, such as nitrogen, and a manifold communicating with the carrier gas source may be provided for directing a vapor stream toward a portion of the surface.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com