About: http://webisa.webdatacommons.org/109513614

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In this embodiment a compliant layer 48 is formed in a pit 50 in the substrate 26D. The pit 50 can be filled with an elastomeric material such as a silicone elastomer to form the compliant layer 48.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr