About: http://webisa.webdatacommons.org/110635650

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The protective layer may be, for example, silicon dioxide or other material, such as spin-on glass (SOG).
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com