About: http://webisa.webdatacommons.org/110758183

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The semiconductor package according to claim 16, wherein each of said first and second passivating films is made of one of insulating materials including silicon oxide and silicon nitride.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com