About: http://webisa.webdatacommons.org/111789047

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As the reader will appreciate, the thick insulator layer 106 can be formed from materials such as silicon dioxide (SiO2), silicon nitrides (SiN/Si2N/Si3N4), silicon oxynitrides (SiOxNy), or other dielectric materials.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr