About: http://webisa.webdatacommons.org/11310731

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	FIG. 7A is a schematic sectional side view of a magnetron PVD chamber comprising a single process zone that is suitable for depositing a cathode film on a surface of a substrate;
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com