About: http://webisa.webdatacommons.org/117159537

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon substrate was a single crystal substrate with a main face of (111), and the size was a diameter of 2 inches and thickness of 0.3 mm.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com