About: http://webisa.webdatacommons.org/117162625

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The present disclosure relates to an optical system, such as an illumination system or a projection lens of a microlithographic exposure system.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com