About: http://webisa.webdatacommons.org/119011089

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The metal layer can be planarized using chemical mechanical polishing or other planarization techniques.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com