About: http://webisa.webdatacommons.org/12661629

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A planar surface is formed including a surface of the first metal contact, a surface of the second metal contact, and a surface of the dielectric material12-09-2010
http://www.w3.org/ns/prov#wasQuotedFrom	faqs.org