About: http://webisa.webdatacommons.org/127201071

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A protective layer 30 of a material such as borophosphosilicate glass (BPSG) or silicon dioxide has been formed over the device 10 by chemical vapor deposition (CVD) or other suitable means.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com