About: http://webisa.webdatacommons.org/130139347

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Subsequently, metal such as aluminum or copper is deposited on the entire surface, followed by CMP to remove the metal on top of the first carbon film 14 to leave interconnects 13 in the trenches 16.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au