About: http://webisa.webdatacommons.org/130322115

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Substrates such as silicon wafers with a blanket coating of 150 ??? titanium followed by 400 ??? of platinum can be loaded into a BZT sputter deposition chamber as descried in connection with FIG. 7.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au