About: http://webisa.webdatacommons.org/132483539

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The film forming chamber is kept at a sufficiently high vacuum, for example at about 10-4 torr or less, or preferably about 10-8 torr or less.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr