About: http://webisa.webdatacommons.org/133239769

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	For example, a barrier layer can be formed of a dielectric material, such as silicon nitride or silicon oxynitride, which is substantially impervious to the diffusion of copper atoms therethrough.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com