About: http://webisa.webdatacommons.org/133534064

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Illustratively, the feature size, or gap 288 between the electrode fingers 284 has a width of about 100 ??m or less, including about 1 ??m to about 100 ??m, even more preferably 75 ??m or less, including about 17 ??m to about 50 ??m.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es