About: http://webisa.webdatacommons.org/135470935

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The stacked layered structure may be formed from Ti/TiN/Cu, Ta/TaN/Cu, WN/Cu and the like when the wiring layer is mainly formed from copper.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au