About: http://webisa.webdatacommons.org/137642175

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Additionally, chemicals such as water or other solutions can be applied to the surface of the wafer so that the solution is between the wafer and the cleaning rod during the time the cleaning rod is powered.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com