About: http://webisa.webdatacommons.org/138023901

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The liner dielectric 1110 can be selected from a material such as silicon nitride SiN or silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com