About: http://webisa.webdatacommons.org/140400202

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In trench isolation methods, a trench is formed on the integrated circuit device and is filled with an insulating material, such as an oxide layer, to form an isolation region that can be smaller than that formed by the LOCOS method.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com