About: http://webisa.webdatacommons.org/140485198

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In some other embodiments, substrate 302 is a silicon, but having a crystal orientation different than <100>, such as <111> silicon and <011> silicon.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com