About: http://webisa.webdatacommons.org/140635133

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A chemical slurry 109 or 211 including an oxidizing agent such as Ferric Nitrate, Potassium Permanganate, or the like may be applied between the layer(s) on a semiconductor substrate 105 or 206 and a electrodialytic pad 101 or 203.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com