About: http://webisa.webdatacommons.org/141194580

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although a material containing mainly aluminum is used as a material for forming the gate electrode (including gate wiring), other material such as tungsten, tantalum, or molybdenum may be used.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com