About: http://webisa.webdatacommons.org/142648632

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Otherwise, by using a material including silicon, such as SiO2 (silicon dioxide), SiON (silicon oxynitride), and SiN, it is possible to reduce the occurrence of the stress in the interlayer insulating films, etc.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com