About: http://webisa.webdatacommons.org/143239573

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Inter-insulating layer 41 is preferably formed from a low-k dielectric material, however, inter-insulating layer 41 may be formed from a material such as silicon dioxide (SiO2) or silicon nitride (SiN).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com