About: http://webisa.webdatacommons.org/147727739

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The first and the second interlayer insulating layers 11 and 15 may include an insulating material such as silicon oxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.es