About: http://webisa.webdatacommons.org/148222574

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Key barriers are the nanopattern process times and pattern formation on current substrate stack layers such as hard masks (e.g., silicon nitride, Si3N4).
http://www.w3.org/ns/prov#wasQuotedFrom	mdpi.com