About: http://webisa.webdatacommons.org/15013543

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An insulating layer 44 of an insulating material containing substantially no oxygen, such as silicon nitride, polyimide orothers is formed on the wiring layer 52.
http://www.w3.org/ns/prov#wasQuotedFrom	patentgenius.com