About: http://webisa.webdatacommons.org/151343971

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	wherein the second insulating films are comprised of a material including silicon and nitrogen, respectively.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr