About: http://webisa.webdatacommons.org/155131704

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Then (FIG. 5), a spacing layer 25, for example of silicon dioxide, is deposited.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com