About: http://webisa.webdatacommons.org/155594597

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The silicon dioxide layer 22 is provided using any suitable means, such as CVD, including LPCVD and PECVD, dry oxidation, wet oxidation or rapid thermal oxidation.
http://www.w3.org/ns/prov#wasQuotedFrom	google.fr