About: http://webisa.webdatacommons.org/156273444

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Alternatively, a substrate 102 itself may comprise a material such as silicon that is substantially smooth, etchable, and able to withstand an etch process to which an intermediate layer 106 is subjected.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au