About: http://webisa.webdatacommons.org/159083649

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate support 130 (230, 330) can be fabricated from a non-electrically conductive material, such as a ceramic.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com