About: http://webisa.webdatacommons.org/159338715

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The method of claim 1, wherein the amorphization implant comprises at least one of germanium, silicon, xenon and other materials which when implanted in a crystalline substrate amorphize the substrate.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com