| http://www.w3.org/ns/prov#value | - (I) the CMP medium contains at least one component that is a beneficial dopant, modifier or other additive of the ferroelectric or high ?? film being removed in the CMP operation (examples include perovskite nanocrystalline particles, such as those of barium strontium titanate; tantalum oxide, niobium oxide, or other donor dopants compensatory for O vacancies or acceptor impurity defects in the th
|
