About: http://webisa.webdatacommons.org/162018055

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	As illustrated in FIG. 16E, spacers 582 are formed at sidewalls of the trenches 553 and n-type dopants such as P or As are implanted into the first n-type epitaxial layer 541 a in a region of a to be formed high-side switch.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com