About: http://webisa.webdatacommons.org/163177149

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	MEMS capacitor Cb1 shown in FIG. 6 is a parallel-plate capacitor that includes top and bottom electrodes 92 and 94, respectively, separated by a spacer layer 96, typically formed of an insulating material such as silicon dioxide.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com