About: http://webisa.webdatacommons.org/166107606

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	The substrate may be a silicon wafer, a gallium arsenide wafer, both with or without active devices on the surface, or ceramics such as alumina ceramic, aluminum nitride, silicon carbide, or glass ceramic.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com