About: http://webisa.webdatacommons.org/16777628

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	An alignment detection system 61 comprises a mechanism for illuminating an alignment mark formed on the wafer, and an image pickup device such as a CCD, for example, taking an image of the alignment mark as illuminated.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com